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3D LITHOGRAPHY. Atomic gold-enabled three-dimensional lithography for silicon mesostructures.
Science
June 2015
Department of Chemistry, the University of Chicago, Chicago, IL 60637, USA. The James Franck Institute, the University of Chicago, Chicago, IL 60637, USA. The Institute for Biophysical Dynamics, Chicago, IL 60637, USA.
Article Synopsis
- Three-dimensional mesostructured semiconductors have potential applications but lack many synthesis methods.
- By using metal diffusion on semiconductor surfaces, specifically gold on silicon nanowires, researchers have created etchant-resistant patterns through a process of deposition-diffusion-incorporation.
- This technique produces unique skeletal and motif structures, and it shows that individual gold atoms play a crucial role in the lithographic process while improving the strength of the resulting material's interaction with hydrogels.