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RSC Adv
August 2024
Department of Physics, Faculty of Science, Istanbul University Istanbul Turkey +90 212 4555766 +90 212 4555700.
Both BaF and MgF compounds and Ba Mg F alloy thin films were deposited on glass and silicon (Si) substrates in nanometric sizes (100 ± 10 nm) in a high vacuum environment by radio frequency (rf) magnetron sputtering. Using BaF (99% purity) and MgF (99% purity) target materials and adjusting the power levels applied to these targets, Ba Mg F alloy coatings at different atomic concentrations were formed under the same vacuum conditions. The microstructure and surface characteristics of the samples were analysed with the help of spectroscopic and microscopic methods.
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