61 results match your criteria: "Institute of Micro- and Nanotechnologies[Affiliation]"

Advancing Glass Engineering: Harnessing Focused Electron Beams for Direct Microstructuring.

Small Methods

March 2025

Technische Universität Ilmenau, Institute of Micro- and Nanotechnologies, Microsystems Technology Group, Max-Planck-Ring 12, 98693, Ilmenau, Germany.

A technological approach for direct glass structuring is presented by exploiting electron-beam-induced defect generation utilizing a conventional scanning electron microscope (SEM). The structuring process is assumed to be linked to electron-beam-induced ion migration and allows to create structures of several hundred nanometers in depth. It is demonstrated that the structuring can be realized in literally any SEM, which thus enables a comparatively simple implementation in support of a broad field of applications.

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Tip-Induced 3D Printing on the Nanoscale with Field Emission Scanning Probes.

Small

February 2025

Institute of Micro- and Nanotechnologies MacroNano, Microsystems Technology Group, Technische Universität Ilmenau, Max-Planck-Ring 12, 98693, Ilmenau, Germany.

3D printing down to the nanoscale remains a significant challenge. In this paper, the study explores the use of scanning probes that emit low-energy electrons (<100 eV) coupled with the localized injection and electron-induced decomposition of precursor molecules, for the precise localized deposition of 3D nanostructures. The experiments are performed inside the chamber of a scanning electron microscope (SEM), enabling the use of the in-built gas injector system (GIS) with gaseous naphthalene precursor for carbon deposition, as well as immediate inspection of the deposits by SEM.

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Article Synopsis
  • * A novel plasmonic sponge has been developed that enhances solar evaporation efficiency to 131% by utilizing advanced 3D nanostructures for better heat localization and full-solar-spectrum absorption.
  • * This 3D plasmonic sponge not only improves freshwater production but also serves as a versatile water purification tool for various types of contaminated water, potentially alleviating freshwater shortages.
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Article Synopsis
  • Hydrogen peroxide (HO) is an eco-friendly and versatile compound essential for various sectors like industry, home care, and healthcare, contributing to environmental sustainability and human health.
  • Traditional production methods using anthraquinone oxidation are being replaced by electrocatalytic synthesis, which leverages renewable energy, oxygen, and water, aligning with modern environmental and energy goals.
  • Recent advancements in two-electron water oxidation electrocatalysts explore design principles, experimental techniques, and the role of chemical microenvironments, enhancing catalyst performance for scalable commercial applications through improved device design and interface engineering.
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Chip-integrated non-mechanical microfluidic pump driven by electrowetting on dielectrics.

Lab Chip

May 2024

Institute of Physics, Group 'Theoretical Physics I', Technische Universität Ilmenau, Weimarer Straße 25, 98693 Ilmenau, Germany.

A microfluidic pump is presented that generates its pumping action the EWOD (electrowetting-on-dielectric) effect. The flow is generated by the periodic movement of liquid-vapor interfaces in a large number (≈10) of microcavities resulting in a volume change of approx. 0.

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Blooming and pruning: learning from mistakes with memristive synapses.

Sci Rep

April 2024

Micro- and Nanoelectronic Systems, Department of Electrical Engineering and Information Technology, TU Ilmenau, Ilmenau, Germany.

Blooming and pruning is one of the most important developmental mechanisms of the biological brain in the first years of life, enabling it to adapt its network structure to the demands of the environment. The mechanism is thought to be fundamental for the development of cognitive skills. Inspired by this, Chialvo and Bak proposed in 1999 a learning scheme that learns from mistakes by eliminating from the initial surplus of synaptic connections those that lead to an undesirable outcome.

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Vector Symbolic Finite State Machines in Attractor Neural Networks.

Neural Comput

March 2024

Bio-Inspired Circuits and Systems Lab, Zernike Institute for Advanced Materials, and Groningen Cognitive Systems and Materials Center, University of Groningen, 9747 AG Groningen, Netherlands

Hopfield attractor networks are robust distributed models of human memory, but they lack a general mechanism for effecting state-dependent attractor transitions in response to input. We propose construction rules such that an attractor network may implement an arbitrary finite state machine (FSM), where states and stimuli are represented by high-dimensional random vectors and all state transitions are enacted by the attractor network's dynamics. Numerical simulations show the capacity of the model, in terms of the maximum size of implementable FSM, to be linear in the size of the attractor network for dense bipolar state vectors and approximately quadratic for sparse binary state vectors.

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Droplet Motion Driven by Liquid Dielectrophoresis in the Low-Frequency Range.

Micromachines (Basel)

January 2024

Institute of Micro- and Nanotechnologies (IMN) MacroNano®, Microsystems Technology Group, Technische Universität Ilmenau, Max-Planck-Ring 12, 98693 Ilmenau, Germany.

Electrohydrodynamic wetting manipulation plays a major role in modern microfluidic technologies such as lab-on-a-chip applications and digital microfluidics. Liquid dielectrophoresis (LDEP) is a common driving mechanism, which induces hydrodynamic motion in liquids by the application of nonhomogeneous electrical fields. Among strategies to analyze droplet movement, systematic research on the influence of different frequencies under AC voltage is missing.

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Exploring the Surface Oxidation and Environmental Instability of 2H-/1T'-MoTe Using Field Emission-Based Scanning Probe Lithography.

Adv Mater

January 2024

Institute of Micro- and Nanotechnologies, Microsystems Technology Group, Technische Universität Ilmenau, Max-Planck-Ring 12, 98693, Ilmenau, Germany.

An unconventional approach for the resistless nanopatterning 2H- and 1T'-MoTe by means of scanning probe lithography is presented. A Fowler-Nordheim tunneling current of low energetic electrons (E = 30-60 eV) emitted from the tip of an atomic force microscopy (AFM) cantilever is utilized to induce a nanoscale oxidation on a MoTe nanosheet surface under ambient conditions. Due to the water solubility of the generated oxide, a direct pattern transfer into the MoTe surface can be achieved by a simple immersion of the sample in deionized water.

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Cutaneous candidiasis is characterized by an overgrowth of leading to skin inflammation and infection. Similar to bacteria, can develop tolerance to common antifungal drugs. Cold atmospheric plasma (CAP), with its proven antimicrobial properties, offers a promising alternative to the prevailing methods.

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Stiffness Considerations for a MEMS-Based Weighing Cell.

Sensors (Basel)

March 2023

Microsystems Technology Group, Institute of Micro- and Nanotechnologies MacroNano®, Technische Universität Ilmenau, Max-Planck-Ring 12, 98693 Ilmenau, Germany.

In this paper, a miniaturized weighing cell that is based on a micro-electro-mechanical-system (MEMS) is discussed. The MEMS-based weighing cell is inspired by macroscopic electromagnetic force compensation (EMFC) weighing cells and one of the crucial system parameters, the stiffness, is analyzed. The system stiffness in the direction of motion is first analytically evaluated using a rigid body approach and then also numerically modeled using the finite element method for comparison purposes.

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Easily Repairable and High-Performance Carbon Nanostructure Absorber for Solar Photothermoelectric Conversion and Photothermal Water Evaporation.

ACS Appl Mater Interfaces

February 2023

Chair Materials for Electrical Engineering and Electronics, Institute of Materials Science and Engineering and Institute of Micro- and Nanotechnologies MacroNano, Technische Universität Ilmenau, Gustav-Kirchhoff-Straße 5, 98693Ilmenau, Germany.

Carbon materials are a category of broadband solar energy harvesting materials that can convert solar energy into heat under irradiation, which can be used for photothermal water evaporation and photothermoelectric power generation. However, destruction of the carbon nanostructure during usage will significantly decrease the light-trapping performance and, thus, limit their practical applications. In this article, an easily repairable carbon nanostructure absorber with full-solar-spectrum absorption and a hierarchically porous structure is prepared.

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Two-dimensional (2D) materials catalysts provide an atomic-scale view on a fascinating arena for understanding the mechanism of electrocatalytic carbon dioxide reduction (CO ECR). Here, we successfully exfoliated both layered and nonlayered ultra-thin metal phosphorous trichalcogenides (MPCh ) nanosheets via wet grinding exfoliation (WGE), and systematically investigated the mechanism of MPCh as catalysts for CO ECR. Unlike the layered CoPS and NiPS nanosheets, the active Sn atoms tend to be exposed on the surfaces of nonlayered SnPS nanosheets.

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Formation of nanoflowers: Au and Ni silicide cores surrounded by SiO branches.

Beilstein J Nanotechnol

January 2023

Chair Materials for Electrical Engineering and Electronics, Institute of Materials Science and Engineering and Institute of Micro- and Nanotechnologies MacroNano, TU Ilmenau, Gustav-Kirchhoff-Straße 5, 98693 Ilmenau, Germany.

This work reports the formation of nanoflowers after annealing of Au/Ni bilayers deposited on SiO/Si substrates. The cores of the nanoflowers consist of segregated Ni silicide and Au parts and are surrounded by SiO branches. The SiO decomposition is activated at 1050 °C in a reducing atmosphere, and it can be enhanced more by Au compared to Ni.

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Multilayer redox-based HfO/AlO/TiO memristive structures for neuromorphic computing.

Sci Rep

October 2022

Micro- and Nanoelectronic Systems, Institute of Micro and Nanotechnologies MacroNano, Technische Universität Ilmenau, Ilmenau, Germany.

Redox-based memristive devices have shown great potential for application in neuromorphic computing systems. However, the demands on the device characteristics depend on the implemented computational scheme and unifying the desired properties in one stable device is still challenging. Understanding how and to what extend the device characteristics can be tuned and stabilized is crucial for developing application specific designs.

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Highly efficient passive Tesla valves for microfluidic applications.

Microsyst Nanoeng

September 2022

Research and Development, 5microns GmbH, Margarethenstraße 6, 98693 Ilmenau, Germany.

A multistage optimization method is developed yielding Tesla valves that are efficient even at low flow rates, characteristic, e.g., for almost all microfluidic systems, where passive valves have intrinsic advantages over active ones.

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Plasma-Assisted Fabrication of Molecularly Imprinted NiAl-LDH Layer on Ni Nanorod Arrays for Glyphosate Detection.

ACS Appl Mater Interfaces

August 2022

Center of Excellence for Environmental Safety and Biological Effects, Beijing Key Laboratory for Green Catalysis and Separation, Department of Chemistry and Biology, Beijing University of Technology, 100124 Beijing, People's Republic of China.

An inorganic-framework molecularly imprinted NiAl layered double hydroxide (MI-NiAl-LDH) with specific template molecule (glyphosate pesticide, Glyp) recognition ability was prepared on Ni nanorod arrays (Ni NRAs) through electrodeposition followed by a low-temperature O plasma treatment. The freestanding Ni/MI-NiAl-LDH NRA electrode had highly enhanced sensitivity and selectivity. The electrocatalytic oxidation of Glyp was proposed to occur at Ni centers in MI-NiAl-LDH, and the current response depended linearly on the Glyp concentration from 10.

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Anisotropy of the ΔE Effect in Ni-Based Magnetoelectric Cantilevers: A Finite Element Method Analysis.

Sensors (Basel)

June 2022

Technical Physics 1 Group, Institute of Micro- and Nanotechnologies (IMN MacroNano®), Technische Universität Ilmenau, Postfach 100565, 98684 Ilmenau, Germany.

In recent investigations of magnetoelectric sensors based on microelectromechanical cantilevers made of TiN/AlN/Ni, a complex eigenfrequency behavior arising from the anisotropic ΔE effect was demonstrated. Within this work, a FEM simulation model based on this material system is presented to allow an investigation of the vibrational properties of cantilever-based sensors derived from magnetocrystalline anisotropy while avoiding other anisotropic contributions. Using the magnetocrystalline ΔE effect, a magnetic hardening of Nickel is demonstrated for the (110) as well as the (111) orientation.

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Standard Gaussian signal detection theory (SDT) is a widely used approach to assess the detection performance of living organisms or technical systems without looking at the inner workings of these systems like neural or electronic mechanisms. Nevertheless, a consideration of the inner mechanisms of a system and how they produce observed behaviors should help to better understand the functioning. It might even offer the possibility to demonstrate isolated pattern separation processes directly in the model.

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Particle separation using surface acoustic waves (SAWs) has been a focus of ongoing research for several years, leading to promising technologies based on Lab-on-a-Chip devices. In many of them, scattering effects of acoustic waves on suspended particles are utilized to manipulate their motion by means of the acoustic radiation force (). Due to viscous damping of radiated waves within a fluid, known as the acoustic streaming effect, a superimposed fluid flow is generated, which additionally affects the trajectories of the particles by drag forces.

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By integrating surface acoustic waves (SAW) into microfluidic devices, microparticle systems can be fractionated precisely in flexible and easily scalable Lab-on-a-Chip platforms. The widely adopted driving mechanism behind this principle is the acoustic radiation force, which depends on the size and acoustic properties of the suspended particles. Superimposed fluid motion caused by the acoustic streaming effect can further manipulate particle trajectories and might have a negative influence on the fractionation result.

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The conversion of solar energy into electric power has been extensively studied, for example, by photovoltaics. However, photo-thermoelectric (P-TE) conversion as an effective solar-to-electricity conversion process is less studied. Here, we present an efficient full-solar-spectrum plasmonic absorber for scalable P-TE conversion based on a simple integration of light absorber and commercial thermoelectric modules.

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Aligned deposition of bottom-up grown nanowires by two-directional pressure-controlled contact printing.

Nanotechnology

March 2022

Technische Universität Ilmenau, Institute of Micro- and Nanotechnologies MacroNano®, Microsystems Technology Group, Max-Planck-Ring 12, D-98693 Ilmenau, Germany.

Aligned large-scale deposition of nanowires grown in a bottom-up manner with high yield is a persisting challenge but required to assemble single-nanowire devices effectively. Contact printing is a powerful strategy in this regard but requires so far adequate adjustment of the tribological surface interactions between nanowires and target substrate, e.g.

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Tailoring Patterned Visible-Light Scattering by Silicon Photonic Crystals.

ACS Appl Mater Interfaces

December 2021

Chair Materials for Electrical Engineering and Electronics, Institute of Materials Science and Engineering and Institute of Micro and Nanotechnologies MacroNano, TU Ilmenau, Gustav-Kirchhoff-Str. 5, 98693 Ilmenau, Germany.

Article Synopsis
  • - Researchers are exploring how the structure of silicon at the nanoscale affects its optical properties, which has applications in optics, energy harvesting, and various industries like anti-reflective coatings.
  • - This study focuses on creating silicon photonic crystals by controlling etching techniques to form ordered arrays of inverted silicon nanopyramids and nanopillars, achieving uniformity and reproducibility in the patterns.
  • - Experimental results show that the reflection characteristics of these nanostructures depend on their aspect ratio and spacing, with visible-light scattering patterns being modifiable through the arranged nanostructures, indicating potential uses in optics, electronics, and energy applications.
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