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The growth behavior and electrical transport properties of ZnO films was found to be strongly dependent on the deionized water soaking treatment of 0.7 wt% (111) SrTiO:Nb substrates. Comparing the ZnO films on soaked SrTiO:Nb substrates with those on unsoaked ones, the out-of-plane orientation of ZnO films are both along the -axis, while there is an in-plane rotation of ZnO thin films.

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