Analysis of plasma-grown carbon oxide and reduced-carbon-oxide nanowalls.

In this study, several characteristics of carbon oxide nanowalls (CONWs) and reduced-carbon-oxide nanowalls (rCONWs) activated using plasma and thermochemistry were investigated. To become modified CONW and rCONW, catalyst-free carbon nanowalls (CNWs) were grown on a silicon (Si) wafer microwave-plasma-enhanced chemical vapor deposition (MPECVD) with a mixture of hydrogen (H) and methane (CH) gases. The CONW was modified by oxidizing a CNW on a Si wafer with plasma treatment using oxygen (O) plasma.