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Since radiation damage is proportional to fluence, radiation damage limits the spatial resolution of biological structures determined by either X-ray or electron scattering. If only elastic scattering is used for structural information then electrons are superior as the ratio of elastic to inelastic scattering is higher than for X-rays. For soft X-rays in the water window below the O K edge photoabsorption contrast might be better than elastic scattering for distinguishing different biological materials.

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