Structural change of graphite bombarded with hydrogen ions as well as energetic electrons is investigated mainly by the EELS (electron energy-loss spectroscopy) technique, with a focus on the formation of diamond-like amorphous (DLA) phase at low temperatures. The chemical effects of hydrogen ions on the amorphization process are examined by comparing the results obtained by hydrogen-ion bombardment with those obtained by electron bombardment. The critical temperatures for the formation of DLA phase during hydrogen-ion and electron bombardments are determined. Finally, a model of the amorphization process of graphite during ion-bombardment is presented.
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