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Accurate operando measurement of AlGaN/GaN HEMTs channel temperature and optimization of thermal design.

Nanotechnology

January 2025

Electronic Sci.&Eng., Xi'an Jiaotong University, 28 Xianning West Road,Beilin District, Xi 'an, Shaanxi Province, China, Xi'an, 710049, CHINA.

The accurate estimation of the temperature distribution of the GaN based power devices and optimization of the device structure is of great significance to possibly solve the self-heating problem, which hinders the further enhancement of the device performances. We present here the operando temperature measurement with high spatial resolution using Raman spectroscopy of AlGaN/GaN high electron mobility transistors (HEMTs) with different device structures and explore the optimization of the device thermal design accordingly. The lateral and depth temperature distributions of the single-finger HEMT were characterized.

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