Research on a New Method of Macro-Micro Platform Linkage Processing for Large-Format Laser Precision Machining.

In recent years, the macro-micro structure (servo platform for macro motion and galvanometer for micro motion) composed of a galvanometer and servo platform has been gradually applied to laser processing in order to address the increasing demand for high-speed, high-precision, and large-format precision machining. The research in this field has evolved from step-and-scan methods to linkage processing methods. Nevertheless, the existing linkage processing methods cannot make full use of the field-of-view (FOV) of the galvanometer. In terms of motion distribution, the existing methods are not suitable for continuous micro segments and generate the problem that the distribution parameter can only be obtained through experience or multiple experiments. In this research, a new laser linkage processing method for global trajectory smoothing of densely discretized paths is proposed. The proposed method can generate a smooth trajectory of the servo platform with bounded acceleration by the finite impulse response (FIR) filter under the global blending error constrained by the galvanometer FOV. Moreover, the trajectory of the galvanometer is generated by vector subtraction, and the motion distribution of macro-micro structure is accurately realized. Experimental verification is carried out on an experimental platform composed of a three-axis servo platform, a galvanometer, and a laser. Simulation experiment results indicate that the processing efficiency of the proposed method is improved by 79% compared with the servo platform processing only and 55% compared with the previous linkage processing method. Furthermore, the method can be successfully utilized on experimental platforms with good tracking performance. In summary, the proposed method adeptly balances efficiency and quality, rendering it particularly suitable for laser precision machining applications.