In the field of non-silicon MEMSs (micro-electro-mechanical systems), nickel, with its mature preparation method, good compatibility with non-silicon MEMS processes, and excellent mechanical properties, is one of the commonly used structural materials. By effectively combining it with non-silicon MEMS processes, nickel is widely used in typical process systems such as LIGA (Lithography, Galvanoformung, Abformung)/UV-LIGA (Ultraviolet Lithography, Galvanoformung, Abformung). However, with the rapid development of the non-silicon MEMS field, pure nickel materials are no longer able to meet current material demands. Alternatively, nickel-cobalt composite materials have excellent mechanical properties, thermal stability, corrosion resistance, and good adaptability to processing technology because cobalt has unique advantages as a reinforcing phase, including excellent wear resistance, corrosion resistance, and high hardness. This article examines the current methods for preparing nickel-cobalt alloys by focusing on composite electrodeposition of coatings and analyzing their advantages and disadvantages. Based on this, the effect of the composite electrodeposition conditions on the formation mechanism of nickel-cobalt alloy coatings is discussed. Then, the research status of composite electrodeposition methods mainly based on nickel-cobalt nanocomposites is discussed. Finally, a new direction for future work on nickel-cobalt composite materials mainly composed of nickel-cobalt nanomaterials prepared by composite electrodeposition is proposed, and its application prospects in non-silicon MEMS fields are discussed.
Download full-text PDF |
Source |
---|---|
http://www.ncbi.nlm.nih.gov/pmc/articles/PMC11858009 | PMC |
http://dx.doi.org/10.3390/nano15040312 | DOI Listing |
Nanomaterials (Basel)
February 2025
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China.
In the field of non-silicon MEMSs (micro-electro-mechanical systems), nickel, with its mature preparation method, good compatibility with non-silicon MEMS processes, and excellent mechanical properties, is one of the commonly used structural materials. By effectively combining it with non-silicon MEMS processes, nickel is widely used in typical process systems such as LIGA (Lithography, Galvanoformung, Abformung)/UV-LIGA (Ultraviolet Lithography, Galvanoformung, Abformung). However, with the rapid development of the non-silicon MEMS field, pure nickel materials are no longer able to meet current material demands.
View Article and Find Full Text PDFMicromachines (Basel)
September 2022
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai 200240, China.
The miniaturization of ion trap mass analyzers is an important direction in the development of mass spectrometers. In this work, we proposed two models of miniaturized HreLIT with a field radius of about 2 mm based on the existing research on conventional HreLIT and other ion traps, one with ions ejection slits on one pair of electrodes only (2-slit model) and the other with the same slits on all electrodes (4-slit model). The relationship of mass resolution with and the "stretch" distance of electrodes in the ejection direction is investigated by theoretical simulations.
View Article and Find Full Text PDFMicromachines (Basel)
February 2022
School of Mechano-Electronic Engineering, Xidian University, Xi'an 710071, China.
As a typical type of MEMS acceleration sensor, the inertial switch can alter its on-off state while the environmental accelerations satisfy threshold value. An exhaustive summary of the design concept, performance aspects, and fabrication methods of the micro electromechanical system (MEMS) inertial switch is provided. Different MEMS inertial switch studies were reviewed that emphasized acceleration directional and threshold sensitivity, contact characteristics, and their superiorities and disadvantages.
View Article and Find Full Text PDFMicromachines (Basel)
July 2021
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai 200240, China.
With the increasing application field, a higher requirement is put forward for the mass spectrometer. The reduction in size will inevitably cause a loss of precision; therefore, it is necessary to develop a high-performance miniature mass spectrometer. Based on the researches of rectangular ion trap, the relationship between mass resolution and structural parameters of the ion trap array was analyzed by further simulation.
View Article and Find Full Text PDFAdv Mater
February 2021
Key Laboratory of Micro-Systems and Microstructures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin, 150080, China.
With the rapid development of micro-electromechanical systems (MEMS), micro/nanoscale fabrication of 3D metallic structures with complex structures and multifunctions is becoming more and more important due to the recent trend of product miniaturization. As a promising micromanufacturing approach based on plastic deformation, micro/nanoforming shows the attractive advantages of high productivity, low cost, near-net-shape, and excellent mechanical properties, compared with other non-silicon-based micromanufacturing technologies. However, micro/nanoforming is far less established due to the so-called size effects in terms of materials models, process laws, tooling design, etc.
View Article and Find Full Text PDFEnter search terms and have AI summaries delivered each week - change queries or unsubscribe any time!