A Laterally Excited Bulk Acoustic Wave Resonator Based on LiNbO with Arc-Shaped Electrodes.

Micromachines (Basel)

The Institute of Technological Sciences, Wuhan University, Wuhan 430072, China.

Published: November 2024

High frequency and large bandwidth are growing trends in communication radio-frequency devices. The LiNbO thin film material is expected to become the preferred piezoelectric material for high coupling resonators in the 5G frequency band due to its ultra-high piezoelectric coefficient and low loss characteristics. The main mode of laterally excited bulk acoustic wave resonators (XBAR) have an ultra-high sound velocity, which enables high-frequency applications. However, the interference of spurious modes is one of the main reasons hindering the widespread application of XBAR. In this paper, a Z-cut LiNbO thin film-based XBAR with arc-shaped electrodes is presented. We investigate the electric field distribution of the XBAR, while the irregular boundary of the arc-shaped electrodes affects the electric field between the existing interdigital transducers (IDTs). The mode shapes and impedance response of the XBAR with arc-shaped electrodes and the XBARs with traditional IDTs are compared in this work. The fabricated XBAR on a 350 nm Z-cut LiNbO thin film with arc-shaped electrodes operating at over 5 GHz achieves a high effective electromechanical coupling coefficient of 29.8% and the spurious modes are well suppressed. This work promotes an XBAR with an optimized electrode design to further achieve the desired performance.

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http://www.ncbi.nlm.nih.gov/pmc/articles/PMC11596732PMC
http://dx.doi.org/10.3390/mi15111367DOI Listing

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