We report a characterization of the spatial resolution of terahertz (THz) apertureless near-field imaging of metal lines deeply buried beneath a silicon dioxide layer. We find a good resolution for edge contrast, even in the case where the capping layer is considerably thicker than the tip radius. We find that contrast and resolution depend on demodulation frequency, thickness of the capping layer, and radius of the tip. Furthermore, we observe a distinct dependence of the contrast on the direction of the incoming radiation, in both experiments and simulations. Characterization of buried features can be a valuable tool in non-contact failure analysis of semiconductor devices.
Download full-text PDF |
Source |
|---|---|
| http://dx.doi.org/10.1364/OE.532478 | DOI Listing |
Publication Analysis
Top Keywords
Similar Publications
Nanoscale characterization of space weathering in lunar samples.
Sci Rep
January 2025
School of Chemistry and Biochemistry, Georgia Institute of Technology, Atlanta, GA, 30332, USA.
Nanoscale Fourier transform infrared (Nano-FTIR) imaging and spectroscopy correlated with photoluminescence measurements of lunar Apollo samples with different surface radiation exposure histories reveal distinct physical and chemical differences associated with space weathering effects. Analysis of two sample fragments: an ilmenite basalt (12016) and an impact melt breccia (15445) show evidence of intrinsic or delivered Nd and an amorphous silica glass component on exterior surfaces, whereas intrinsic Cr and/or trapped electron states are limited to interior surfaces. Spatially localized 1050 cm/935 cm band ratios in Nano-FTIR hyperspectral maps may further reflect impact-induced shock nanostructures, while shifts in silicate band positions indicate accumulated radiation damage at the nanoscale from prolonged space weathering due to micrometeorites, solar wind, energetic x-rays and cosmic ray bombardment.
View Article and Find Full Text PDFSpacetime Imaging of Group and Phase Velocities of Terahertz Surface Plasmon Polaritons in Graphene.
Nano Lett
January 2025
Regensburg Center for Ultrafast Nanoscopy (RUN) and Department of Physics, University of Regensburg, 93040 Regensburg, Germany.
Detecting electromagnetic radiation scattered from a tip-sample junction has enabled overcoming the diffraction limit and started the flourishing field of polariton nanoimaging. However, most techniques only resolve amplitude and relative phase of the scattered radiation. Here, we utilize field-resolved detection of ultrashort scattered pulses to map the dynamics of surface polaritons in both space and time.
View Article and Find Full Text PDFIn Depth Mapping of Mesoporous Silica Nanoparticles in Malignant Glioma Cells Using Scattering-Type Scanning Near-Field Optical Microscopy.
Chem Biomed Imaging
December 2024
Experimental Solid State Physics Group, Department of Physics, Imperial College, Exhibition Road, SW72AZ London, U.K.
Mesoporous silica nanoparticles (MSNPs) are promising nanomedicine vehicles due to their biocompatibility and ability to carry large cargoes. It is critical in nanomedicine development to be able to map their uptake in cells, including distinguishing surface associated MSNPs from those that are embedded or internalized into cells. Conventional nanoscale imaging techniques, such as electron and fluorescence microscopies, however, generally require the use of stains and labels to image both the biological material and the nanomedicines, which can interfere with the biological processes at play.
View Article and Find Full Text PDFOptical Flow Sensor with Fluorescent-Conjugated Hyperelastic Pillar: A Biomimetic Approach.
Biomimetics (Basel)
November 2024
Ocean and Maritime Digital Technology Research Division, Korea Research Institute of Ships and Ocean Engineering, Daejeon 34103, Republic of Korea.
Although the Doppler velocity log is widely applied to measure underwater fluid flow, it requires high power and is inappropriate for measuring low flow velocity. This study proposes a fluid flow sensor that utilizes optical flow sensing. The proposed sensor mimics the neuromast of a fish by attaching a phosphor to two pillar structures (A and B) produced using ethylene propylene diene monomer rubber.
View Article and Find Full Text PDFTerahertz scanning near-field optical microscopy for biomedical detection: Recent advances, challenges, and future perspectives.
Biotechnol Adv
December 2024
Center of Super-Resolution Optics and Chongqing Engineering Research Center of High-Resolution and Three-Dimensional Dynamic Imaging Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China; Chongqing School, University of Chinese Academy of Sciences, Chongqing 400714, China. Electronic address:
Terahertz (THz) radiation is widely recognized as a non-destructive, label-free, and highly- sensitive tool for biomedical detections. Nevertheless, its application in precision biomedical fields faces challenges due to poor spatial resolution caused by intrinsically long wavelength characteristics. THz scanning near-field optical microscopy (THz-SNOM), which surpasses the Rayleigh criterion, offers micrometer and nanometer-scale spatial resolution, making it possible to perform precise bioinspection with THz imaging.
View Article and Find Full Text PDFWant AI Summaries of new PubMed Abstracts delivered to your In-box?
Enter search terms and have AI summaries delivered each week - change queries or unsubscribe any time!