AI Article Synopsis

  • The study evaluates the accuracy of electron-excited X-ray microanalysis using energy-dispersive spectrometry (EDS) at a low beam energy of 5 keV, suitable for analyzing almost all elements on the periodic table, except hydrogen and helium.
  • Elemental analysis was performed on various certified reference materials, stoichiometric compounds, minerals, and metal alloys, totaling 263 measurements across 39 elements in 113 materials.
  • Results showed high accuracy, with over 98% of measurements within ±5% relative deviation from expected values, and 82% falling within a tighter range of -2% to 2% relative deviation.

Article Abstract

The accuracy of electron-excited X-ray microanalysis with energy-dispersive spectrometry (EDS) has been tested in the low beam energy range, specifically at an incident beam energy of 5 keV, which is the lowest beam energy for which a useful characteristic X-ray peak can be excited for all elements of the periodic table, excepting H and He. Elemental analysis results are reported for certified reference materials (CRM), stoichiometric compounds, minerals, and metal alloys of independently known or measured composition which had microscopic homogeneity suitable for microanalysis. Two-hundred sixty-three concentration measurements for 39 elements in 113 materials were determined following the and using the EDS analytical software NIST DTSA-II. The accuracy of the results, as characterized by the (RDEV) metric, was such that more than 98% of the results were found to be captured within a range of ±5% RDEV, while 82% of the results fell in the range -2% to 2% RDEV.

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http://www.ncbi.nlm.nih.gov/pmc/articles/PMC11513705PMC
http://dx.doi.org/10.1007/s10853-024-10285-4DOI Listing

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