Silicon-based double fano resonances photonic integrated gas sensor.

The telecommunication wavelengths are crucial for developing a photonic integrated circuit (PIC). The absorption fingerprints of many gases lie within these spectral ranges, offering the potential to create a miniaturized gas sensor for PIC. This work presents novel double Fano resonances within the telecommunication band, based on silicon metasurfaces for selective gas sensing applications. Our proposed design comprises periodically coupled nanodisk and nanobar resonators mounted on a quartz substrate. Fano resonances can be engineered across the range from λ = 1.52 μm to λ = 1.7 μm by adjusting various geometrical parameters. A double detection sensor of carbon monoxide (CO) at λ = 1.566 μm and nitrous oxide (NO) at λ = 1.674 μm is developed. The sensor exhibits exceptional refractometric sensitivity to CO of 1,735 nm/RIU with an outstanding FOM of 11,570 at the first Fano resonance (FR1). In addition, the sensor shows a sensitivity to NO of 194 nm/RIU accompanied by an FOM of 510 at the second Fano resonance (FR2). The structure reveals absorption losses of 6.3% for CO at the FR1, indicating the sensor selectivity to CO. The sensor is less selective at FR2 and limited to spectral shifts induced by each gas type. Our proposed design holds significant promise for the development of a highly sensitive double-sensing refractometric photonic integrated gas sensor.