PbS-based SWIR micro-spectrometer with on-chip Fabry-Perot filter array.

Miniaturized and portable on-chip spectrometers have been widely explored to facilitate many applications including chemical analysis, environmental monitoring, medical diagnostics, and astronomical observations. However, the optical spectra of micro-spectrometers are mostly within the visible range. Here, we develop high-performance short-wave infrared (SWIR) micro-spectrometers through the integration of wafer-scale uniform lead sulfide (PbS) thin films with an on-chip Fabry-Perot filter array. The optoelectronic performance of PbS-based detectors could be markedly improved through the optimization of chemical bath deposition (CBD) conditions. The high-sensitivity PbS detectors based on the Fabry-Perot filter array demonstrate chemical analysis application.