We demonstrate high-extraction-rate TaO-core/SiO-clad photonic waveguides on silicon fabricated by the photolithography-assisted chemo-mechanical etching technique. Low-confinement waveguides of larger than 70% coupling efficiency with optical fibers and medium propagation loss around 1 dB/cm are investigated in the experiment. Monolithic microring resonators based on TaO waveguides have shown the quality factors to be above 10 near 1550 nm. The demonstrated TaO waveguides and their fabrication method hold great promise in various cost-effective applications, such as optical interconnecting and switching.
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| http://www.ncbi.nlm.nih.gov/pmc/articles/PMC11397605 | PMC |
| http://dx.doi.org/10.3390/nano14171466 | DOI Listing |
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