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Micro-Opto-Electro-Mechanical Systems for High-Precision Displacement Sensing: A Review. | LitMetric

Micro-Opto-Electro-Mechanical Systems for High-Precision Displacement Sensing: A Review.

Micromachines (Basel)

School of Instrument and Electronics, North University of China, Taiyuan 030051, China.

Published: August 2024

High-precision displacement sensing has been widely used across both scientific research and industrial applications. The recent interests in developing micro-opto-electro-mechanical systems (MOEMS) have given rise to an excellent platform for miniaturized displacement sensors. Advancement in this field during past years is now yielding integrated high-precision sensors which show great potential in applications ranging from photoacoustic spectroscopy to high-precision positioning and automation. In this review, we briefly summarize different techniques for high-precision displacement sensing based on MOEMS and discuss the challenges for future improvement.

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Source
http://www.ncbi.nlm.nih.gov/pmc/articles/PMC11356231PMC
http://dx.doi.org/10.3390/mi15081011DOI Listing

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