Fringe projection profilometry based on MEMS micro-vibration mirrors is very promising due to its rapid projection, large depth of field, compact size, and low cost. Although high-frequency fringes can achieve accurate reconstruction, the projector must offer sufficient pixel resolution. In this paper, we proposed a high-resolution projection technique called the delay superposition method. During a single exposure time of the camera, the projector projects a group of low-resolution fringe patterns, which are delayed according to the movement characteristics of the vibration mirror. Then, the camera exposure superimposes these low-resolution images to form a high-resolution image. These two steps effectively subdivide the angle intervals, thereby achieving a pixel interpolation. Finally, experimental results show that the proposed method can significantly improve the projector's pixel resolution and reconstruction accuracy. The proposed method allows the MEMS projector's pixel resolution (along one direction) to far exceed that of common DLP projectors. It holds great application potential for high-frequency fringe projection.
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