Integration of SmCo Micromagnets in a Ferromagnetic Multipolar Microrotor to Enhance MEMS and Micromotor Performance.

MEMS and micromotors may benefit from the increasing complexity of rotors by integrating a larger number of magnetic dipoles. In this article, a new microassembly and bonding process to integrate multiple SmCo micromagnets in a ferromagnetic core is presented. We experimentally demonstrate the feasibility of a multipolar micrometric magnetic rotor with 11 magnetic dipoles made of N35 SmCo micromagnets (length below 250 μm and thickness of 65 μm), integrated on a ferromagnetic core. We explain the micromanufacturing methods and the multistep microassembly process. The core is manufactured on ferromagnetic alloy FeCoV and has an external diameter of 800 μm and a thickness of 200 μm. Magnetic and geometric measurements show good geometric fitting and planarity. The manufactured microrotor also shows good agreement among the magnetic measurements and the magnetic simulations which means that there is no magnetic degradation of the permanent magnet during the manufacturing and assembly process. This technique enables new design possibilities to significantly increase the performance of micromotors or MEMS.