AI Article Synopsis
- There's a growing need for advanced measurement systems that can track multiple degrees of freedom (DOF) accurately and efficiently.
- A 3DOF displacement sensor using optical micro-gratings has been developed, demonstrating a theoretical resolution of 3 nm and an experimental resolution of about 8 nm.
- This sensor's compact design and high precision make it promising for applications in fields like mechanical engineering and semiconductor processing.
Article Abstract
In recent years, there has been an increasing demand for a multiple degrees of freedom (DOF) measurement system with high performance and high integration. Here, we report a 3DOF displacement sensor based on the self-imaging effect of optical micro-gratings. The optical field distribution behind a micro-grating with a period of 3 µm is analyzed theoretically. The transmission properties of a double-grating structure are investigated in theory. In the experiment, 3DOF displacement measurement within a range of 1 mm is demonstrated. Using an interpolation circuit with a subdividing factor of 1000, displacement measurement with a theoretical resolution of 3 nm is realized. The experimental resolution is ∼8 . An error within 2 µm is obtained experimentally within a range of 1 mm for 3DOF measurement. With a few optical components such as a beam splitter prism and beam expanders, the sensor shows potential in developing ultra-compact multi-DOF displacement measuring systems. Together with a nanometric resolution, the 3DOF displacement sensor has shown great potential in applications such as high-precision mechanical engineering and semiconductor processing.
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Article Synopsis
- There's a growing need for advanced measurement systems that can track multiple degrees of freedom (DOF) accurately and efficiently.
- A 3DOF displacement sensor using optical micro-gratings has been developed, demonstrating a theoretical resolution of 3 nm and an experimental resolution of about 8 nm.
- This sensor's compact design and high precision make it promising for applications in fields like mechanical engineering and semiconductor processing.
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