Correction: Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones.

Roberto Pezone Sebastian Anzinger Gabriele Baglioni Hutomo Suryo Wasisto Pasqualina M Sarro Peter G Steeneken Sten Vollebregt

Microsyst Nanoeng

Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, Delft, The Netherlands.

Published: June 2024

[This corrects the article DOI: 10.1038/s41378-024-00656-x.].

Download full-text PDF	Source
http://www.ncbi.nlm.nih.gov/pmc/articles/PMC11148189	PMC
http://dx.doi.org/10.1038/s41378-024-00705-5	DOI Listing

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