Using dielectric deflective metasurfaces, we propose a novel, to the best of our knowledge, out-of-plane modulation scheme to realize vertical coupling on a 220 nm silicon-on-insulator platform. The metasurface is used to deflect vertical incident light to an oblique angle with high efficiency in the cladding layer. This deflection introduces a lateral wave vector component, thus preventing bi-directional transmission of traditional vertical coupling due to the second-order Bragg reflection of the grating. Additionally, an apodized design is employed for the subwavelength grating to improve mode matching with a deflection angle incident. The integration of the metasurface and subwavelength grating enables a new vertical coupling scheme with high efficiency. After global optimization, we achieved a simulation coupling efficiency of -2.19 dB. The measured coupling efficiency is -3.36 dB with a center wavelength of 1545.6 nm and a 1-dB bandwidth of 32 nm. The results confirm the feasibility of the proposed new architecture.
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