This article presents lithium niobate (LiNbO) based on shear horizontal (SH0) resonators, utilizing a suspended structure, for radio frequency (RF) applications. It demonstrates the design, analysis, and fabrication of SH0 resonators based on a 36Y-cut LiNbO thin film. The spurious-free SH0 resonator achieves an electromechanical coupling coefficient (kt2) of 42.67% and a quality factor (Q) of 254 at the wave-propagating orientation of 0° in the 36Y-cut plane.
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| http://dx.doi.org/10.3390/mi15040477 | DOI Listing |
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