Design, fabrication, and characterization of a high-sensitivity integrated quartz vibrating beam accelerometer.

This paper describes the design, fabrication, and characterization of a quartz vibrating beam accelerometer consisting of a metal spring-mass and quartz double-ended tuning forks (DETFs). In this approach, the inertial force of the proof mass pulls or compresses the DETFs, affecting their resonance frequency and, thus, enabling the quasi-digital measurement of acceleration. An isolation structure was specifically designed to prevent the external interference stress from transforming into the DETFs and to decrease the DETFs' thermal stress as the ambient temperature changes. A stress-free and high-precision wire-cut electrical discharge machining process was introduced to solve the fabrication problem of flexible hinges, and a femtosecond laser was used to release the proof mass, comprehensively considering the compatibility of the fabrication process and structural design. The oscillation excitation and detection of the DETFs were analyzed, and the DETFs were fabricated using a micro-electromechanical systems process. Sensor dimensions were optimized to improve sensor sensitivity. An accelerometer prototype was fabricated, and its performance was characterized. The tested scale factor was 157.28 Hz/g, and its stability was 16.54 ppm. The bias stability and 1 g stability at 1 h were 18 and 7.84 µg, respectively. The experimental results validated the feasibility of the sensor design.