Highly Selective Tilted Triangular Springs with Constant Force Reaction.

Sensors (Basel)

Microsystems Technology, Faculty of Electrical Engineering and Information Technology, Ruhr University Bochum, 44801 Bochum, Germany.

Published: March 2024

AI Article Synopsis

  • Guiding mechanisms in MEMS (Micro-Electro-Mechanical Systems) typically require a spring that is flexible in one direction while being stiff in others.
  • The introduction of triangular springs with a preset tilting angle helps lower and stabilize the reaction force, enhancing the spring's performance.
  • Experimental results demonstrate that these tilted triangular springs maintain constant force reactions across a wide range of deflections and can effectively support a comb-drive actuator.

Article Abstract

Guiding mechanisms are among the most elementary components of MEMS. Usually, a spring is required to be compliant in only one direction and stiff in all other directions. We introduce triangular springs with a preset tilting angle. The tilting angle lowers the reaction force and implements a constant reaction force. We show the influence of the tilting angle on the reaction force, on the spring stiffness and spring selectivity. Furthermore, we investigate the influence of the different spring geometry parameters on the spring reaction force. We experimentally show tilted triangular springs exhibiting constant force reactions in a large deflection range and a comb-drive actuator guided by tilted triangular springs.

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Source
http://www.ncbi.nlm.nih.gov/pmc/articles/PMC10935291PMC
http://dx.doi.org/10.3390/s24051677DOI Listing

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