AI Article Synopsis
- Pressure sensing is crucial in various industries, but traditional electronic sensors often fail in harsh environments.
- Recent advancements in microelectromechanical systems (MEMS) using fiber-optic Fabry-Perot (FP) technology are gaining attention for their resilience and adaptability.
- The review covers the basic principles, material types, applications, recent innovations like 3D printing, and explores future opportunities and challenges in the field.
Article Abstract
Pressure sensing plays an important role in many industrial fields; conventional electronic pressure sensors struggle to survive in the harsh environment. Recently microelectromechanical systems (MEMS) fiber-optic Fabry-Perot (FP) pressure sensors have attracted great interest. Here we review the basic principles of MEMS fiber-optic FP pressure sensors and then discuss the sensors based on different materials and their industrial applications. We also introduce recent progress, such as two-photon polymerization-based 3D printing technology, and the state-of-the-art in this field, e.g., sapphire-based sensors that work up to 1200 °C. Finally, we discuss the limitations and opportunities for future development.
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|---|---|
| http://www.ncbi.nlm.nih.gov/pmc/articles/PMC10893101 | PMC |
| http://dx.doi.org/10.3390/s24041079 | DOI Listing |
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