Fluorinated MOF-Based Hexafluoropropylene Nanotrap for Highly Efficient Purification of Octafluoropropane Electronic Specialty Gas.

High-purity octafluoropropane (CF) electronic specialty gas is a key chemical raw material in semiconductor and integrated circuit manufacturing industry, while selective removal of hexafluoropropylene (CF) impurity for CF purification is essential but a challenging task. Here we report a fluorinated cage-like MOF Zn-bzc-CF (bzc=5-(trifluoromethyl)-1H-pyrazole-4-carboxylic acid) for CF/CF separation. The incorporation of -CF groups not only provides suitable pore aperture size for highly efficient size-exclusive CF/CF separation, but also creates hydrophobic microenvironments, endowing Zn-bz-CF high chemical stability. Remarkably, Zn-bzc-CF exhibits high CF adsorption capacity while excluding CF, achieving ideal molecular-sieving CF/CF separation. Breakthrough experiments show that Zn-bzc-CF can efficiently separate CF/CF mixture and high-purity CF (99.9 %) can be obtained.