AI Article Synopsis
- A multi-step electron beam lithographic process was enhanced by adding a deposition step.
- This addition allows for the height dimension to be manipulated, making it easier to design resonators.
- This is crucial for creating geometrically complex, intrinsically chiral structures in metasurfaces.
Article Abstract
An additional deposition step was added to a multi-step electron beam lithographic fabrication process to unlock the height dimension as an accessible parameter for resonators comprising unit cells of quasi-bound states in the continuum metasurfaces, which is essential for the geometric design of intrinsically chiral structures.
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| http://www.ncbi.nlm.nih.gov/pmc/articles/PMC10844267 | PMC |
| http://dx.doi.org/10.1038/s41377-023-01368-z | DOI Listing |
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