Compact Micro-Coriolis Mass-Flow Meter with Optical Readout.

Micromachines (Basel)

Integrated Devices and Systems, University of Twente, 7522 NB Enschede, The Netherlands.

Published: January 2024

AI Article Synopsis

  • This paper introduces a new nickel-plated micro-Coriolis mass-flow sensor that features an integrated optical readout system.
  • The sensor utilizes a U-shaped tube made of electroplated nickel, measuring 60 mm in length and 580 µm in inner diameter, which is actuated by Lorentz forces to measure mass flows of water and isopropyl alcohol.
  • The study reports linear phase shift responses related to mass flow, with sensitivities very similar for both fluids at 0.41 mdegg/h for water and 0.43 mdegg/h for isopropyl alcohol.

Article Abstract

This paper presents the first nickel-plated micro-Coriolis mass-flow sensor with integrated optical readout. The sensor consists of a freely suspended tube made of electroplated nickel with a total length of 60 mm, an inner diameter of 580 µm, and a wall thickness of approximately 8 µm. The U-shaped tube is actuated by Lorentz forces. An optical readout consisting of two LEDs and two phototransistors is used to detect the tube motion. Mass-flow measurements were performed at room temperature with water and isopropyl alcohol for flows up to 200 g/h and 100 g/h, respectively. The measured resonance frequencies were 1.67 kHz and 738 Hz for water and 1.70 kHz and 752 Hz for isopropyl alcohol for the twist and swing modes, respectively. The measured phase shift between the two readout signals shows a linear response to mass flow with very similar sensitivities for water and isopropyl alcohol of 0.41mdegg/h and 0.43 mdegg/h, respectively.

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Source
http://www.ncbi.nlm.nih.gov/pmc/articles/PMC10821207PMC
http://dx.doi.org/10.3390/mi15010114DOI Listing

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