AI Article Synopsis
- This paper introduces a new design for a piezoelectric micromachined ultrasonic transducer (PMUT) that enhances the acoustic performance by using a stepped-tube backside cavity approach.
- The new design shows significant improvements: a 17% increase in output sound pressure, a reduction in half-power beam width from 55° to 30°, and a decrease in side lobe signal levels.
- The fabrication process is compatible with standard CMOS technology, making it stable, cost-effective, and suitable for large-scale production, suggesting its potential for practical applications in ranging technologies.
Article Abstract
This paper presents a novel piezoelectric micromachined ultrasonic transducer (PMUT) with theoretical simulation, fabrication, and testing. Conventional methods using a PCB or an external horn to adjust the PMUT acoustic field angle are limited by the need for transducer size. To address this limitation, the stepped-tube (expanded tube) backside cavity PMUT has been proposed. The stepped-tube PMUT and the tube PMUT devices have the same membrane structure, and the acoustic impedance matching of the PMUT is optimized by modifying the boundary conditions of the back cavity structure. The acoustic comparison experiments show that the average output sound pressure of the stepped-tube backside cavity PMUT has increased by 17%, the half-power-beam-width (θ) has been reduced from 55° to 30° with a reduction of 45%, and the side lobe level signal is reduced from 147 mV to 66 mV. In addition, this work is fabricated on an eight-inch wafer. The process is compatible with standard complementary metal oxide semiconductor (CMOS), conditions are stable, and the cost is controllable, plus it facilitates the batch process. These conclusions suggest that the stepped-tube backside cavity PMUT will bring new, effective, and reliable solutions to ranging applications.
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|---|---|
| http://www.ncbi.nlm.nih.gov/pmc/articles/PMC10819439 | PMC |
| http://dx.doi.org/10.3390/mi15010072 | DOI Listing |
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Article Synopsis
- This paper introduces a new design for a piezoelectric micromachined ultrasonic transducer (PMUT) that enhances the acoustic performance by using a stepped-tube backside cavity approach.
- The new design shows significant improvements: a 17% increase in output sound pressure, a reduction in half-power beam width from 55° to 30°, and a decrease in side lobe signal levels.
- The fabrication process is compatible with standard CMOS technology, making it stable, cost-effective, and suitable for large-scale production, suggesting its potential for practical applications in ranging technologies.
Single photons are pivotal building blocks for photonic quantum technologies. Semiconductor quantum dots are promising candidates for optimal single photon sources in terms of purity, brightness and indistinguishability. Here we embed quantum dots into bullseye cavities with a backside dielectric mirror to enhance the collection efficiency up to near 90%.
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