AI Article Synopsis
- A new way to design tiny sensors called MEMS was created using a simulation that helps improve the design automatically over time.
- This method was used to make a special part of a pressure sensor that works much better than older designs, increasing strength and reducing errors.
- The new sensor showed great performance by being very sensitive and having very little mistake, making it super effective at measuring pressure.
Article Abstract
In this paper, a novel simulation-based evolutionary method is presented for designing parameter-free MEMS structures with maximum degrees of freedom. This novel design method enabled semiautomatic structure evolution by weighing the attributes of each segment of the structure and yielded an optimal design after multiple iterations. The proposed method was utilized to optimize the pressure-sensitive diaphragm of a piezoresistive pressure sensor (PPS). Finite element method (FEM) simulations revealed that, in comparison to conventional diaphragms without islands and with square islands, the optimized diaphragm increased the stress by 10% and 16% and reduced the nonlinearity by 57% and 77%, respectively. These improvements demonstrate the value of this method. Characterization of the fabricated PPS revealed a high sensitivity of 8.8 mV V MPa and a low nonlinearity of 0.058% FS at 20 °C, indicating excellent sensor performance.
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Source |
|---|---|
| http://www.ncbi.nlm.nih.gov/pmc/articles/PMC10600208 | PMC |
| http://dx.doi.org/10.1038/s41378-023-00596-y | DOI Listing |
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