In this work, we analyze the performance of finite-size metal-dielectric nanoslits guided mode resonance metasurface optical filters by using finite-difference time-domain simulations and spatial Fourier transform analysis. It is shown that in the direction of the nanoslits period, the critical size required to maintain the performance of the corresponding infinite size filter is the product of the nanoslits period and the quality factor of the infinite size filter. Size reduction in this dimension below the critical dimension reduces the peak transmittance and broadens the spectral linewidth of the filter. In the dimension orthogonal to the nanoslits period direction, the critical dimension size required is not related to the quality factor of the corresponding infinite size filter. Our analysis shows that the critical size is 12 times the filter peak wavelength in the orthogonal dimension for maintaining the filter performance. The 12 times filter wavelength requirement corresponds to the second zero of the Fourier transform of the aperture function.
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