We present a new, to the best of our knowledge, experimental method for assessing sub-micron level subsurface damage (SSD) on optical glass. The method correlates surface characteristics such as the fracture toughness and Young's modulus via nanoindentation with the penetration depth into the tested surfaces at different overall penetration depths, as revealed by magnetorheological finishing spotting techniques. Our results on ground surfaces suggest that low surface roughness does not necessarily imply the absence of SSD. We also compared SSD on surfaces processed by deterministic microgrinding and femtosecond (fs) laser polishing. The fs-laser polished surfaces revealed no detectable SSD, thus establishing the feasibility of fs-laser polishing for precision optical manufacturing.
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