We present simultaneous 1D imaging and broadband spectroscopy of a laser-produced plasma (LPP) source of extreme ultraviolet light, using a tapered zone plate that is matched to the dispersion of a transmission grating. We describe the design and fabrication of the zone plates in the 5-80 nm wavelength regime with designed spatial resolution of ∼10 µm and spectral resolution of ∼0.8 nm. Subsequently, we benchmark the imaging spectrometer with a solid tin target LPP. Plane wave propagation simulations qualitatively match the experimental results and confirm the device performance.
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Nat Commun
December 2024
Elettra - Sincrotrone Trieste S.C.p.A., S.S. 14 km 163.5 in Area Science Park, 34149, Trieste, Italy.
Light manipulation at the nanoscale is essential both for fundamental science and modern technology. The quest to shorter lengthscales, however, requires the use of light wavelengths beyond the visible. In particular, in the extreme ultraviolet regime these manipulation capabilities are hampered by the lack of efficient optics, especially for polarization control.
View Article and Find Full Text PDFSci Rep
December 2024
College of Civil Engineering and Transportation, Hohai University, Nanjing, 210098, China.
The columnar joint skeleton of 3D printed Acrylonitrile Butadiene Styrene (ABS) material, the skeleton of cement mortar and ultraviolet aging treatment are combined to pour the columnar joint rock mass (CJRM) test block. The strength, deformation, energy and failure modes of the specimens with different dip angles were analyzed by uniaxial compression test. The influence of joint skeleton on the strength of the test block was analyzed.
View Article and Find Full Text PDFNano Lett
December 2024
Intel Corporation, Technology Research Group, Hillsboro, Oregon 97124, United States.
Intel's efforts to build a practical quantum computer are focused on developing a scalable spin-qubit platform leveraging industrial high-volume semiconductor manufacturing expertise and 300 mm fabrication infrastructure. Here, we provide an overview of the design, fabrication, and demonstration of a new customized quantum test chip, which contains 12-quantum-dot spin-qubit linear arrays, code named Tunnel Falls. These devices are fabricated using immersion and extreme ultraviolet lithography (EUV), along with other standard high-volume manufacturing (HVM) processes as well as production-level process control.
View Article and Find Full Text PDFJ Phys Chem Lett
December 2024
Key Laboratory of Radiation Physics and Technology, Ministry of Education, Institute of Nuclear Science and Technology, Sichuan University, No. 24 South Section 1, Yihuan Road, 610065 Chengdu, People's Republic of China.
Obtaining effective extreme ultraviolet lithography (EUVL) materials for pragmatic applications remains challenging. The experimental design and conventional theoretical prediction are time-consuming and costly and hardly affordable to accelerate the discovery of commercial EUVL materials. In this work, we employed the machine learning (ML) technique to predict the ionization potential of promising EUVL materials, which is closely related to the photoresists' solubility switch.
View Article and Find Full Text PDFWe report on continuous high-harmonic generation (HHG) at 1 kHz repetition rate from a liquid-sheet plasma mirror driven by relativistic-intensity near-single-cycle light transients. Through precise control of both the surface plasma density gradient and the driving light waveform, we can produce highly stable and reproducible extreme ultraviolet spectral quasi-continua, expected to correspond to the generation of stable kHz-trains of isolated attosecond pulses in the time domain. This confirms the exciting potential of liquid-sheet targets as one of the building blocks of future high-power attosecond lasers.
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