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Department of Electronic Engineering, National Yunlin University of Science and Technology, 123 University Road, Section 3, Douliou, Yunlin 640301, Taiwan.
Published: July 2023
AI Article Synopsis
CoFe-based alloys and rare earth elements are key materials for enhancing soft magnetic characteristics in devices.
CoFeSm films were created on glass using the sputtering technique, followed by annealing to analyze their microstructural and optical properties.
Thicker CoFeSm films and higher annealing temperatures improved surface smoothness, wear resistance, adhesive properties, and optical transparency.
Article Abstract
CoFe-based alloys and rare earth (RE) elements are among the most studied materials in applying magnetic devices to improve soft magnetic characteristics. A series of CoFeSm films are deposited on a glass substrate via the sputtering technique, followed by an annealing process to investigate their effect on microstructural and optical properties of CoFeSm films. In this study, the increase in the thickness of CoFeSm films and annealing temperatures resulted in a smoother surface morphology. The 40 nm CoFeSm films annealed 300 °C are expected to have good wear resistance and adhesive properties due to their high values of H/E ratio and surface energy. Optical transparency also increased due to the smoother surface of the CoFeSm films.
