Correction: Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a fast-stop ionic current-monitored TSWE method.

Microsyst Nanoeng

School of Integrated Circuits, Tsinghua University, 100084 Beijing, China.

Published: July 2023

[This corrects the article DOI: 10.1038/s41378-023-00532-0.].

Download full-text PDF	Source
http://www.ncbi.nlm.nih.gov/pmc/articles/PMC10368625	PMC
http://dx.doi.org/10.1038/s41378-023-00564-6	DOI Listing

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