Modeling and calibration of micro/nano FBG temperature probe for scanning probe microscopy.

To accurately measure the local temperatures of the micro-nano area, we propose an optical method using a tapered fiber Bragg grating (FBG) probe with a nano tip for scanning probe microscopy (SPM). When the tapered FBG probe senses local temperature through near-field heat transfer, the intensity of the reflected spectrum decreases, along with a broadening bandwidth and a shift in the central peak position. Modeling the heat transfer between the probe and the sample shows that the tapered FBG probe is in a non-uniform temperature field when approaching the sample surface. Simulation of the probe's reflection spectrum reveals that the central peak position shifts nonlinearly with increasing local temperature. In addition, the near-field temperature calibration experiments show that the temperature sensitivity of the FBG probe increases nonlinearly from 6.2 pm/°C to 9.4 pm/°C as the sample surface temperature increases from 25.3°C to 160.4°C. The agreement of the experimental results with the theory and the reproducibility demonstrate that this method offers a promising approach for exploring micro-nano temperature.