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The evolution of surface damage in laser direct cleaning (LDC) of nanoparticulate contamination on silicon (Si) was theoretically and experimentally investigated. Nanobumps with a volcano-like shape were found in near-infrared laser cleaning of polystyrene latex nanoparticles on Si wafers. According to the finite-difference time-domain simulation and the high-resolution surface characterization, unusual particle-induced optical field enhancement in the vicinity of the interface between Si and nanoparticles is mainly responsible for the generation of volcano-like nanobumps. This work is of fundamental significance for the understanding of the laser-particle interaction during LDC and will promote the development of nanofabrication and nanoparticle cleaning applications in optics, microelectromechanical systems, and semiconductors.
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