Digital holographic microscopy (DHM) is an effective method for the evaluation of surface topography. It combines the high lateral resolution of microscopy with the high axial resolution of interferometry. In this paper, DHM with subaperture stitching for tribology is presented. The developed approach allows large surface area inspection by stitching together multiple measurements, which brings a big advantage to the evaluation of tribological tests such as a tribological track on a thin layer. The whole track measurement provides additional parameters, which can offer more information on the result of the tribological test than the conventional four-profile measurement by a contact profilometer.
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| http://dx.doi.org/10.1364/AO.484468 | DOI Listing |
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- The text outlines the development of a plug-and-play adaptive optics module for commercial microscopes that uses a deformable phase plate to improve image quality through aberration correction.
- By estimating aberration profiles at multiple points and stitching corrected images together, the system aims to create high-quality full-field images.
- An empirical method is introduced to optimize measurement time and correction quality by aligning the field segment size with the isoplanatic patch, enhancing overall performance in real-world applications.
Stitching interferometry is an essential technique for the non-contact, high-precision measurement of large apertures or complex optical surfaces. However, the accuracy of full-aperture surface reconstruction is significantly compromised by subaperture positioning and systematic errors. To address this challenge, this study introduces a novel stitching interferometry method utilizing alternating calibration of positioning and systematic errors (SIAC).
View Article and Find Full Text PDFTo eliminate the reference mirror (REF) error of the Fizeau interferometer for measuring X-ray mirrors, the reference calibration method of lateral multi-shift measurements at the hundreds-micrometer pixel level is presented. Because of the high aspect ratio of long X-ray mirrors, by shifting the surface under test (SUT) along the tangential direction with integer multiple pixels, we extend the calibration method by using the difference between multiple shifted measurements to build an augmented multi-matrix for extracting the two-dimensional (2D) absolute surface. The method can be applied to arbitrary measurement regions of the test optics, and the measurement for both the benchmark sub-aperture and calibration of the REF is accomplished in a single measuring process.
View Article and Find Full Text PDFIn response to the urgent need for highly precise and efficient stitching measurements of large-aperture-angle non-holonomic spherical surfaces, a differential confocal interference automatic stitching measurement system for large-aperture-angle non-holonomic spherical surfaces was developed. The system realizes precise positioning of the confocal position through differential confocal precise focusing technology. Through the stitching model, coordinate transformation and error compensation were performed on subaperture data, and the stitching measurement of the spherical surface shape was realized.
View Article and Find Full Text PDFLimited by measurement methods, measuring the surfaces and thickness of large thin parallel plates has been challenging. In this paper, we propose a multi-dimensional stitching method using thickness alignment (MSuTA), which use the sub-aperture stitching method based on the phenomenon of parallel plate self-interference with wavelength-tuned interferometer (WTI) for measuring the surfaces and thickness of large thin parallel plates. We establish the stitching correction model based on Legendre polynomial to separate the aberrations caused by the elastic deformation of the thin plate in the unconstrained support tooling by analyzing the influence of the stress state of the thin plate with unconstrained three-point support.
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