Design and Optimization of Tool-Embedded Thin-Film Strain Sensor Substrate Structure.

With the intelligent tool cutting force measurement model as the engineering background, the selection, design, and optimization of the substrate structure of the tool-embedded thin-film strain sensor are studied. The structure of the thin-film strain sensor is studied, and the substrate structure design is divided into function area structure design and connection area structure design. Establishing the substrate structure library of the sensor, we subdivide the library into six layouts of function area infrastructure and five layouts of connection area infrastructure. Taking the sensitivity, fatigue life, and comprehensive mechanical properties of the substrate structure as the design indexes, based on the statics theory, the functional relationship between the structural parameters and the deflection of the six layouts of the substrate function area is established; based on the dynamics theory, the functional relationship between the parameters and the natural frequency of six layouts of the function area is established; based on the coupling of structural statics design theory and dynamics design theory, the evaluation method for the comprehensive performance of the parameters of six layouts of the function area is established. Based on the function area structure, five connection area structures are designed for comprehensive performance analysis. The structural sensitivity of the substrate function area design and optimization is expanded 1.75 times, and the comprehensive performance is expanded 1.53 times. The sensitivity of the connection area design and optimization is expanded 2.3 times, and the comprehensive performance is expanded 1.72 times. The structure is optimized according to the structural stress characteristics, the design, selection, and optimization process of the substrate structure summarized herein, and five design criteria of the substrate structure are proposed.