The critical dimension (CD), roughness, and sensitivity are extremely significant indicators for evaluating the imaging performance of photoresists in extreme ultraviolet lithography. As the CD gradually shrinks, tighter indicator control is required for high fidelity imaging. However, current research primarily focuses on the optimization of one indicator of one-dimensional line patterns, and little attention has been paid to two-dimensional patterns. Here, we report an image quality optimization method of two-dimensional contact holes. This method takes horizontal and vertical contact widths, contact edge roughness, and sensitivity as evaluation indicators, and uses machine learning to establish the corresponding relationship between process parameters and each indicator. Then, the simulated annealing algorithm is applied to search for the optimal process parameters, and finally, a set of process parameters with optimum image quality is obtained. Rigorous imaging results of lithography demonstrate that this method has very high optimization accuracy and can improve the overall performance of the device, dramatically accelerating the development of the lithography process.
Download full-text PDF |
Source |
|---|---|
| http://dx.doi.org/10.1364/AO.479619 | DOI Listing |
Publication Analysis
Top Keywords
Similar Publications
A reliable unmanned aerial vehicle multi-ship tracking method.
PLoS One
January 2025
North China Institute of Aerospace Engineering, Langfang, China.
As the global economy expands, waterway transportation has become increasingly crucial to the logistics sector. This growth presents both significant challenges and opportunities for enhancing the accuracy of ship detection and tracking through the application of artificial intelligence. This article introduces a multi-object tracking system designed for unmanned aerial vehicles (UAVs), utilizing the YOLOv7 and Deep SORT algorithms for detection and tracking, respectively.
View Article and Find Full Text PDFEnhancing semantical text understanding with fine-tuned large language models: A case study on Quora Question Pair duplicate identification.
PLoS One
January 2025
Department of Biomedical and Health Informatics, Tsui Laboratory, Children's Hospital of Philadelphia, Philadelphia, PA, United States of America.
Semantical text understanding holds significant importance in natural language processing (NLP). Numerous datasets, such as Quora Question Pairs (QQP), have been devised for this purpose. In our previous study, we developed a Siamese Convolutional Neural Network (S-CNN) that achieved an F1 score of 82.
View Article and Find Full Text PDFBifurcation and stability analysis of within host HIV dynamics with multiple infections and intracellular delay.
Chaos
January 2025
Department of Mathematics, Indian Institute of Technology Patna, Patna 801103, India.
Human immunodeficiency virus (HIV) manifests multiple infections in CD4+ T cells, by binding its envelope proteins to CD4 receptors. Understanding these biological processes is crucial for effective interventions against HIV/AIDS. Here, we propose a mathematical model that accounts for the multiple infections of CD4+ T cells and an intracellular delay in the dynamics of HIV infection.
View Article and Find Full Text PDFExperimental-design-based optimization of dispersive liquid-liquid microextraction coupled with gas chromatography-negative-ion chemical ionization-mass spectrometry for the determination of pyrethroids in agricultural products and drinks.
Food Addit Contam Part A Chem Anal Control Expo Risk Assess
January 2025
Department of Chemistry, National Kaohsiung Normal University, Kaohsiung City, Taiwan.
Pyrethroids are synthetic chemicals that account for 16% of the international insecticide market and have been shown to be of varying toxicity to different species. There are various methods available for detecting pyrethroids in agricultural products, but these products must be pre-treated to remove interference from the food matrix, such as through dispersion liquid-liquid microextraction (DLLME). This study employed two experimental design methods to optimize the continuous and discontinuous experimental parameters of DLLME and investigated whether DLLME combined with GC-NICI-MS is effective for detecting pyrethroids in agricultural products.
View Article and Find Full Text PDFGeophysical and geochemical characterization of Odogbo Dumpsite, Ijebu Ijesa, Southwestern Nigeria.
Environ Monit Assess
January 2025
Department of Chemistry, Vaal University of Technology, Vanderbijlpark, South Africa.
Due to incessant contamination of the groundwater system near the dumpsite in southwestern Nigeria Basement Complex, this study seeks to evaluate the impact of the Odogbo dumpsite on the local groundwater system by integrating geophysical and geochemical methodologies. Aeromagnetic data covering the study area was acquired, processed, and enhanced to delineate basement features that could potentially be passing plumes to the groundwater system. Concurrently, geoelectric methods using 2-D dipole-dipole imaging and vertical electrical sounding (VES) were utilized to characterize the vulnerability indices of the lithologies underlying the dumpsite.
View Article and Find Full Text PDFWant AI Summaries of new PubMed Abstracts delivered to your In-box?
Enter search terms and have AI summaries delivered each week - change queries or unsubscribe any time!