Polymer waveguide phase modulators (PMs) demonstrate high thermal confinement with outstanding thermo-optic properties and can provide stable low-power phase modulation in optical phased arrays (OPA). On the other hand, silicon nitride (SiN) waveguides produce stronger optical confinement with smaller waveguide core sizes than polymer waveguides and can handle high optical power without nonlinear effects. In this work, a high-performance PM was achieved by monolithic integration of a polymer waveguide and tapered SiN input and output waveguides. The integration of heterogeneous waveguide materials on a single substrate will enable the fabrication of efficient OPAs for advanced imaging, display, sensing, and communications applications.
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