Recently, due to the development of semiconductor technology, high-performance memory and digital convergence technology that integrates and implements various functions into one semiconductor chip has been regarded as the next-generation core technology. In the semiconductor manufacturing process, various motors are being applied for automated processes and high product reliability. However, dust and shaft loss due to mechanical friction of a general motor system composed of motor-bearing are problematic for semiconductor wafer processing. In addition, in the edge bread remove (EBR) process after the photoresist application process, a nozzle position control system for removing unnecessary portions of the wafer edge is absolutely necessary. Therefore, in this paper, in order to solve the problems occurring in the semiconductor process, a six-degrees-of-freedom (6-DOF) magnetic levitation system without shaft and bearing was designed for application to the semiconductor process system; and an integrated driving control algorithm for 6-DOF control (levitation, rotation, tilt (Roll-Pitch), X-Y axis movement) using the force of each current component derived through current vector control was proposed. Finally, the 6-DOF magnetic levitation system with the non-contact position sensors was fabricated and the validity of the 6-DOF magnetic levitation control method proposed in this paper was verified through a performance test using a prototype.
Download full-text PDF |
Source |
|---|---|
| http://www.ncbi.nlm.nih.gov/pmc/articles/PMC9862467 | PMC |
| http://dx.doi.org/10.3390/s23020905 | DOI Listing |
Publication Analysis
Top Keywords
Similar Publications
A Robust Tri-Electromagnet-Based 6-DoF Pose Tracking System Using an Error-State Kalman Filter.
Sensors (Basel)
September 2024
Shien-Ming Wu School of Intelligent Engineering, South China University of Technology, Guangzhou 511442, China.
Magnetic pose tracking is a non-contact, accurate, and occlusion-free method that has been increasingly employed to track intra-corporeal medical devices such as endoscopes in computer-assisted medical interventions. In magnetic pose-tracking systems, a nonlinear estimation algorithm is needed to recover the pose information from magnetic measurements. In existing pose estimation algorithms such as the extended Kalman filter (EKF), the 3-DoF orientation in the S3 manifold is normally parametrized as unit quaternions and simply treated as a vector in the Euclidean space, which causes a violation of the unity constraint of quaternions and reduces pose tracking accuracy.
View Article and Find Full Text PDFExternal Steering of Vine Robots via Magnetic Actuation.
Soft Robot
September 2024
Science and Technologies of Robotics in Medicine (STORM) Lab, School of Electronic and Electrical Engineering, University of Leeds, Leeds, United Kingdom.
This article explores the concept of external magnetic control for vine robots to enable their high curvature steering and navigation for use in endoluminal applications. Vine robots, inspired by natural growth and locomotion strategies, present unique shape adaptation capabilities that allow passive deformation around obstacles. However, without additional steering mechanisms, they lack the ability to actively select the desired direction of growth.
View Article and Find Full Text PDFProspective head motion correction at 3 Tesla with wireless NMR markers and ultrashort echo navigators.
Magn Reson Imaging
December 2024
Vanderbilt University Institute of Imaging Science, Vanderbilt University Medical Center, Nashville, TN 37235, USA; Department of Radiology and Radiological Sciences, Vanderbilt University Medical Center, Nashville, TN 37235, USA.
Purpose: Prospective motion correction (PMC) with inductively-coupled wireless NMR markers has been shown to be an effective plug-and-play method for dealing with head motion at 7 Tesla [29,30]. However, technical challenges such as one-to-one identification of three wireless markers, generation of hyper-intense marker artifacts and low marker peak SNR in the navigators has limited the adoption of this technique. The goal of this work is to introduce solutions to overcome these issues and extend this technique to PMC for brain imaging at 3 Tesla.
View Article and Find Full Text PDFComparison of T1-weighted landmark placement and ROI transfer onto diffusion-weighted EPI sequences for targeted tractography tasks in the optic nerve.
Eur J Neurosci
September 2024
Department of Neuroradiology, University Medical Center of the Johannes Gutenberg-University Mainz, Mainz, Germany.
Diffusion-based tractography in the optic nerve requires sampling strategies assisted by anatomical landmark information (regions of interest [ROIs]). We aimed to investigate the feasibility of expert-placed, high-resolution T1-weighted ROI-data transfer onto lower spatial resolution diffusion-weighted images. Slab volumes from 20 volunteers were acquired and preprocessed including distortion bias correction and artifact reduction.
View Article and Find Full Text PDFOn the design of a macro-micro parallel manipulator for cochlear microrobot operations.
Int J Med Robot
August 2024
Department of Mechatronics Engineering, Izmir Katip Celebi University, Izmir, Turkey.
Background: The method of stem cell transfer to narrow cochlear canals in vivo to generate hair cells is still an unclear operation. Thus, the development of any possible method that will ensure the usage of medical microrobots in small cochlear workspaces is a challenging procedure.
Methods: The current study tries to introduce a macro-micro manipulator system composed of a 6-DoF industrial serial manipulator as a macro manipulator and a proposed 5-DoF parallel manipulator with dual end effectors as a micro manipulator carrying permanent magnets for tetherless microrobot actuation inside the cochlea.
Want AI Summaries of new PubMed Abstracts delivered to your In-box?
Enter search terms and have AI summaries delivered each week - change queries or unsubscribe any time!