The micro-electromechanical system (MEMS) sensors are suitable devices for vibrational analysis in complex systems. The Fabry-Pérot interferometer (FPI) is used due to its high sensitivity and immunity to electromagnetic interference (EMI). Here, we present the design, fabrication, and characterization of a silicon-on-insulator (SOI) MEMS device, which is embedded in a metallic package and connected to an optical fiber. This integrated micro-opto-electro-mechanical system (MOEMS) sensor contains a mass structure and handle layers coupled with four designed springs built on the device layer. An optical reading system using an FPI is used for displacement interrogation with a demodulation technique implemented in LabVIEW. The results indicate that our designed MOEMS sensor exhibits a main resonant frequency of 1274 Hz with damping ratio of 0.0173 under running conditions up to 7 g, in agreement with the analytical model. Our experimental findings show that our designed and fabricated MOEMS sensor has the potential for engineering application to monitor vibrations under high-electromagnetic environmental conditions.
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| http://www.ncbi.nlm.nih.gov/pmc/articles/PMC9867042 | PMC |
| http://dx.doi.org/10.3390/mi14010231 | DOI Listing |
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