Characteristics of laser induced discharge tin plasma and its extreme ultraviolet radiation.

Front Optoelectron

Wuhan National Research Center for Optoelectronics, Huazhong University of Science and Technology, Wuhan, 430074, China.

Published: September 2021

In this paper, a CO laser induced discharge plasma extreme ultraviolet (EUV) source experimental device was established. The optical emission spectroscopy was used to diagnose the characteristics of the plasma, and the evolution of electron temperature and electron density with time was obtained. The influence of discharge voltage on plasma parameters was analyzed and discussed. The EUV radiation characteristics of the plasma were investigated by self-made grazing incidence EUV spectrometer. The EUV radiation intensity and conversion efficiency were discussed.

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http://www.ncbi.nlm.nih.gov/pmc/articles/PMC9743888PMC
http://dx.doi.org/10.1007/s12200-020-0964-8DOI Listing

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