This paper proposes a compound data-driven control method to solve the problems of low damping resonance, different dynamic properties, and hysteresis in the large-range compliant micropositioning stage driven by a Maxwell reluctance actuator. First, in order to verify the proposed control algorithm, a reluctance-actuated, XY compliant micropositioning stage is constructed according to the principle of operation of a reluctance actuator. Second, in order to eliminate the influence of complex dynamics on the controller design, a fractional order proportional-integral feedback controller is designed using a data iterative feedback turning algorithm. Third, the finite impulse response feedforward filter is optimized using experimental data, and the on-line inverse estimation of the system frequency response function and its iterative feedforward compensation are carried out to further eliminate the influence of light damping resonance. Finally, the proposed control method is used for tracking the experiment and compared with other methods. The experimental results show that the proposed control method can better meet the requirements of high precision, fast speed, and strong anti-interference ability for large stroke micro/nanopositioning and tracking.
Download full-text PDF |
Source |
---|---|
http://dx.doi.org/10.1063/5.0098759 | DOI Listing |
ISA Trans
January 2025
Institute of Artificial Intelligence and Future Networks, Beijing Normal University at Zhuhai, Zhuhai, China; BNU-HKBU United International College Tangjiawan, Rd. JinTong 2000#, Zhuhai, China. Electronic address:
In this paper, a novel recursive hierarchical parametric identification method based on initial value optimization is proposed for Wiener-Hammerstein systems subject to stochastic measurement noise. By transforming the traditional Wiener-Hammerstein system model into a generalized form, the system model parameters are uniquely expressed for estimation. To avoid cross-coupling between estimating block-oriented model parameters, a hierarchical identification algorithm is presented by dividing the parameter vector into two subvectors containing the coupled and uncoupled terms for estimation, respectively.
View Article and Find Full Text PDFSensors (Basel)
September 2024
State Key Laboratory of Precision Measuring Technology and Instruments, Laboratory of Micro/Nano Manufacturing Technology, Tianjin University, Tianjin 300072, China.
Replacing the endocentric lenses in traditional Phase-Measuring Deflectometry (PMD) with bi-telecentric lenses can reduce the number of parameters to be optimized during the calibration process, which can effectively increase both measurement precision and efficiency. Consequently, the low distortion characteristics of bi-telecentric PMD contribute to improved measurement accuracy. However, the calibration of the extrinsic parameters of bi-telecentric lenses requires the help of a micro-positioning stage.
View Article and Find Full Text PDFRev Sci Instrum
July 2024
State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China.
In this paper, a long-stroke parallel compliant tip-tilt-piston micropositioning stage driven by voice coil motors (VCMs) is proposed. The stage is equipped with three sets of driving arms, which include a spherical hinge, VCM, and parallelogram guide mechanism, evenly spaced at 120° intervals. The spherical hinge is composed of orthogonal leaf-spring beams, and the VCM is embedded into the parallelogram mechanism to form a compact design.
View Article and Find Full Text PDFSensors (Basel)
January 2024
Department of Mechanical Engineering, College of Engineering, Shantou University, Shantou 515063, China.
This paper presents a novel design and control strategies for a parallel two degrees-of-freedom (DOF) flexure-based micropositioning stage for large-range manipulation applications. The motion-guiding beam utilizes a compound hybrid compliant prismatic joint (CHCPJ) composed of corrugated and leaf flexures, ensuring increased compliance in primary directions and optimal stress distribution with minimal longitudinal length. Additionally, a four-beam parallelogram compliant prismatic joint (4BPCPJ) is used to improve the motion decoupling performance by increasing the off-axis to primary stiffness ratio.
View Article and Find Full Text PDFRev Sci Instrum
October 2023
Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong, Shatin, Hong Kong, China.
This paper presents a comprehensive review of mechanical design and synthesis methods for piezo-actuated compliant micro-positioning stages, which play an important role in areas where high precision motion is required, including bio-robotics, precision manufacturing, automation, and aerospace. Unlike conventional rigid-link mechanisms, the motion of compliant mechanisms is realized by using flexible elements, whereby deformation requires no lubrication while achieving high movement accuracy without friction. As compliant mechanisms differ significantly from traditional rigid mechanisms, recent research has focused on investigating various technologies and approaches to address challenges in the flexure-based micro-positioning stage in the aspects of synthesis, analysis, material, fabrication, and actuation.
View Article and Find Full Text PDFEnter search terms and have AI summaries delivered each week - change queries or unsubscribe any time!