A novel two-degrees of freedom (2-DOF) piezo-driven positioning platform with the working stroke being over 20 cm.

Rev Sci Instrum

Key Laboratory of CNC Equipment Reliability, Ministry of Education, School of Mechanical and Aerospace Engineering, Jilin University, Changchun, Jilin 130022, China.

Published: October 2022

Multi-degrees of freedom piezo-driven precision positioning platforms with large working strokes are demanded in many research fields. Although many multi-degrees of freedom piezo-driven positioning platforms have been proposed, few of them can achieve both large working stroke and high speed, which hinders their applications. In this study, a two-degrees of freedom piezo-driven positioning platform was proposed by stacking two identical stick-slip piezoelectric actuators. To simplify the practical implementation of a large working stroke, the actuator employed a special structure, in which the compliant mechanism and the slider were connected together as a mover and the guide rail was fixed as a stator. The working stroke of the actuator can be increased easily by increasing only the length of the guide rail without changing the output performances. By designing a lever-type compliant mechanism (LCM) on the side surface of the slider, a large loading space was obtained. Theoretical calculation and finite element analysis of the LCM were performed in detail. As the structures of these two stick-slip piezoelectric actuators are the same, only the output performances of the upper actuator (x direction) were tested as an example. Experimental results indicated that the upper actuator had a stable bi-direction motion with a working stroke being over 20 cm. The maximum speeds along the positive x and negative x directions reached 17.864 and 18.73 mm/s, and the resolutions were 100 and 230 nm, respectively. Furthermore, the vertical loading capacity was larger than 60 N.

Download full-text PDF

Source
http://dx.doi.org/10.1063/5.0106657DOI Listing

Publication Analysis

Top Keywords

working stroke
20
piezo-driven positioning
12
freedom piezo-driven
12
large working
12
two-degrees freedom
8
positioning platform
8
multi-degrees freedom
8
positioning platforms
8
stick-slip piezoelectric
8
piezoelectric actuators
8

Similar Publications

Want AI Summaries of new PubMed Abstracts delivered to your In-box?

Enter search terms and have AI summaries delivered each week - change queries or unsubscribe any time!