To fabricate high-precision and accurate optics relative to the optical design surface, a high level of deterministic control of material removal (i.e., the tool influence function, TIF) during subaperture tool polishing is required. In this study, a detailed analysis of the pressure distribution, which is a key component of the TIF, has been performed using finite element analysis to couple together solid mechanics and fluid dynamics. Modeling experimental parameters of recently published work reveals that, when considering tool deformation, which in turn influences the fluid film thickness between the tool and workpiece, the effective pressure profile has a flat-top distribution. This flat-top pressure profile differs from the parabolic pressure distributions predicted by Hertzian mechanics. Moreover, the shear contribution is shown here to be a key contributor to material removal, inducing the removal at the periphery of the contact edge and even outside the generally accepted contact area. Finally, the simulated fluid velocities provide evidence of mixed-mode contact polishing, supporting recent experimental findings that also suggest that onset of hydroplaning contributions lead to material removal drop-off.
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