Plasmonic internal-photoemission-based Si photodetector design suitable for optical communication.

We propose a high-performance plasmonic photodetector based on the internal photoemission (IPE) process for the C-band communication wavelength. This photodetector takes advantage of an embedded nanohole array in Schottky metal. Owing to localized surface plasmon resonance, the absorption of the active metal layer increases, which results in the generation of more hot carriers and subsequently compensates for the low efficiency of IPE-based photodetectors. Simulations show that for the proposed photodetector with 2-nm-thick Au, Cu, and Ag Schottky contacts, the absorptance dramatically enhances to 95.1%, 93.2%, and 98.2%, respectively, at the wavelength of 1.55 µm. For the detector based on Au, the highest external quantum efficiency of 25.3% and responsivity of 0.32 A/W are achieved at a reverse bias voltage of 1 V. Furthermore, the 3 dB bandwidth can exceed 369 GHz owing to the low capacitance of the structure and the fast transit time of carriers from the thin p-Si layer. Finally, by studying the current-voltage characteristics of the photodetector, it is shown that under the reverse bias voltage of 1 V, the dark current is 665 nA at room temperature, and by reducing the temperature to 200 K, it improves three orders of magnitude and decreases to 810 pA.