Linewidth considerations for MEMS tunable VCSEL LiDAR.

The flexible membranes used in MEMS tunable VCSELs are so small and light that thermally induced vibrations can impact laser performance. We measure the thermal vibration spectrum of such a membrane showing peaks at the spatial vibration mode resonant frequencies of the membrane/plate. These vibrations result in a theoretical floor to the linewidth of the VCSEL. Frequency domain LiDAR and optical coherence tomography systems can get around this thermal linewidth limit with adequate clock measurement and processing. Essentially an OCT/LiDAR sweep with a concomitantly measured clock is a feed-forward linewidth reduction scheme. This can be achieved because the membrane resonances are relatively low frequency. LiDAR ranging out to 9 meters has been demonstrated with a resolution of 13 μm, close to the transform limit for the 70 nm sampling range.